Dr. Bo Da of NIMS Present Latest Advancements in Key Materials for Semiconductor Electron Beam Equipment at the Hitachi Foundation Report Meeting

On March 2, 2026, Dr. Bo Da from the National Institute for Materials Science (NIMS) was invited to give a presentation at the Kurata Grant Research Report Meeting organized by the Hitachi Foundation. In his talk, he introduced recent research progress on key functional materials for semiconductor electron-beam instruments. The presentation highlighted a novel crystalline thin-film material with rotationally symmetric orientation structures and discussed its potential applications in electron-beam focusing, electron optical devices, and next-generation microfocus X-ray sources. This work provides new material and physical foundations for the development of advanced electron-beam instruments.